Abstract

The authors have been studied on the detection and measure the bombarding phenornena by electrically neutral and nonradiative particles applying the luminescence. One point of the paper is the detection of bombarding particle and the second is the detection of reacted surface. The work has been done experimentally and theoretically. Experimentally, the spark was formed between needle electrodes in test vessel which contained ZnO:Zn as the fluorescent material or polytetra,fluoroethylene (PTFE). The fluorescent ray was measured by a photomultipiier through the filter and polymer surface by XPS. The simulation was a]so done to estimate the flow of neutral excited particles, represented by N₂(A³∑^+_u), by diffusion process. It was found that in the degradation of polymers by corona discharge not only oxygen but nitrogen has an important role, in particular N₂(A) particles. Results of investigation proved usefulness of luminescence techniques in diagnostic of plasma processes.