No. 119, 2007, 29-38
Abstract
In this paper we present a simple and cheap microwave (2.45 GHz) source of microdischarges in argon and neon at atmospheric pressure. The source consisted of cheap 2.45 GHz microwave magnetron generator and 50 Ω coaxial line terminated with a simple coaxial plasma applicator. The new microwave source of microdischarges operated stable in the form of a small plasma jet at absorbed microwave powers of 9-80 W and gas flow artes of 0.5-0.25 l/min. The length and diameter of plasma jets were 1.5-14 mm and 0.5-1.5 mm, respectively, depending on the kind of gas, gas flow rate and microwave power abosrbed by the discharge. The temperature of the plasma jets could be changed from 30oc to 1200oC by changing the gas flow rate or/and absorbed microwave power. The electron density in the plasma jet was around 3 ⋅ 1014 cm-3 – 1.1 ⋅ 1015 cm-3, depending on the discharge conditions.
Keywords:
microwave discharges, microplasma, atmospheric pressure plasma