Abstract

Non-eqilibrium (cold) plasmas operated at or close to atmospheric pressure have become very important. Recent progress in the operation of corona discharges and dielectric-barrier discharges and their applications is discussed. New large-volume appiications include high-power excimer ultraviolet lamps, excimer based fluorescent lamps and large-area flat plasma display panels. Novel processes include the treatrnent of large gas flows for odour and pollution control and the selective functionalization of flat surfaces, fibres, fabrics and powders, Further innovative applications can be expected frorn the combination of recently developed microcavity plasma arrays, DBD operation and microfabrication technologies suited for mass production. Large apertures of parallel miniature non-equilibrium discharges can be operated silrrultaneously. If small apertures are used gas can be fed through these microplasmas, thus creating the unique possibility to combine microreactor technology with non-equilibrium plasma chemistry and possiblv also catalysis.